Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing / Smyntyna, V. A., Sviridova, O. V. (2010)
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web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000349129
  Semiconductor Physics, Quantum Electronics and Optoelectronics        А - 2019  /     Issue (2010, Vol. 13, № 1)

Smyntyna V. A., Sviridova O. V.
Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing

Cite:
Smyntyna, V. A., Sviridova, O. V. (2010). Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing. Semiconductor Physics, Quantum Electronics and Optoelectronics , 13 (1), 74-78. http://jnas.nbuv.gov.ua/article/UJRN-0000349129

 

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