Complex destruction of near-surface silicon layers of Si-SiO2 structure / Yatsunskiy, I. R., Kulinich, O. A. (2010)
web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000349387
Semiconductor Physics, Quantum Electronics and Optoelectronics    А - 2019 /  Issue (2010, Vol. 13, № 4)
Yatsunskiy I. R., Kulinich O. A.
Complex destruction of near-surface silicon layers of Si-SiO2 structure
Cite:
Yatsunskiy, I. R., Kulinich, O. A. (2010). Complex destruction of near-surface silicon layers of Si-SiO2 structure. Semiconductor Physics, Quantum Electronics and Optoelectronics , 13 (4), 418-421. http://jnas.nbuv.gov.ua/article/UJRN-0000349387 | |
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