Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters / Sarikov, A., Naseka, V. (2012)
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web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000350278
  Semiconductor Physics, Quantum Electronics and Optoelectronics        А - 2019  /     Issue (2012, Vol. 15, № 1)

Sarikov A., Naseka V.
Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters

Cite:
Sarikov, A., Naseka, V. (2012). Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters. Semiconductor Physics, Quantum Electronics and Optoelectronics , 15 (1), 8-12. http://jnas.nbuv.gov.ua/article/UJRN-0000350278

 

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