Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics / Vaskevich, V. V., Gajshun, V. E., Kovalenko, D. L. (2014)
Ukrainian

English   Nanosystems, nanomaterials, nanotechnologies   /     Issue (2014, 12 (2))

Vaskevich V. V., Gajshun V. E., Kovalenko D. L.
Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics


Cite:
Vaskevich, V. V., Gajshun, V. E., Kovalenko, D. L. (2014). Synthesis and study of silicate sol–gel coatings for micro- and nanoelectronics. Nanosystems, nanomaterials, nanotechnologies, 12 (2), 279-293. http://jnas.nbuv.gov.ua/article/UJRN-0000476016 [In Russian].

 

Institute of Information Technologies of VNLU


+38 (044) 525-36-24
Ukraine, 03039, Kyiv, Holosiivskyi Ave, 3, room 209