Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering / Vjunov, O. I., Kovalenko, L. L., Belous, A. G., Bohnke, O., Bohnke, C. (2014)
Ukrainian

English   Nanosystems, nanomaterials, nanotechnologies   /     Issue (2014, 12 (2))

Vjunov O. I., Kovalenko L. L., Belous A. G., Bohnke O., Bohnke C.
Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering


Cite:
Vjunov, O. I., Kovalenko, L. L., Belous, A. G., Bohnke, O., Bohnke, C. (2014). Fabrication of nanosize LiPON films by means of high-frequency magnetron sputtering. Nanosystems, nanomaterials, nanotechnologies, 12 (2), 303-311. http://jnas.nbuv.gov.ua/article/UJRN-0000476018 [In Russian].

 

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