Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material / Kovtun, Yu. V., Skibenko, E. I., Skibenko, A. I., Yuferov, V. B. (2012)
web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000685748 Ukrainian journal of physics А - 2018 / Issue (2012, Vol. 57, № 9)
Kovtun Yu. V., Skibenko E. I., Skibenko A. I., Yuferov V. B. Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material
Cite: Kovtun, Yu. V., Skibenko, E. I., Skibenko, A. I., Yuferov, V. B. (2012). Estimation of the efficiency of material injection into the reflex discharge by sputtering the cathode material. Ukrainian journal of physics, 57 (9), 901-908. http://jnas.nbuv.gov.ua/article/UJRN-0000685748 |
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