A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide / Filatov, Ju. D., Vetrov, A. G., Sidorko, V. I., Filatov, A. Ju., Kovalev, S. V. (2013)
Ukrainian

English  Superhard Materials   /     Issue (2013, 5)

Filatov Ju. D., Vetrov A. G., Sidorko V. I., Filatov A. Ju., Kovalev S. V.
A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide


Cite:
Filatov, Ju. D., Vetrov, A. G., Sidorko, V. I., Filatov, A. Ju., Kovalev, S. V. (2013). A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide. Superhard Materials, 5, 63-71. http://jnas.nbuv.gov.ua/article/UJRN-0000695893 [In Russian].

 

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