Modeling of X-ray rocking curves for layers after two-stage ion-implantation / Liubchenko, O. I., Kladko, V. P., Gudymenko, O. Yo. (2017)
web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000778515
Semiconductor Physics, Quantum Electronics and Optoelectronics    А - 2019 /  Issue (2017, Vol. 20, № 3)
Liubchenko O. I., Kladko V. P., Gudymenko O. Yo.
Modeling of X-ray rocking curves for layers after two-stage ion-implantation
Cite:
Liubchenko, O. I., Kladko, V. P., Gudymenko, O. Yo. (2017). Modeling of X-ray rocking curves for layers after two-stage ion-implantation. Semiconductor Physics, Quantum Electronics and Optoelectronics , 20 (3), 355-361. http://jnas.nbuv.gov.ua/article/UJRN-0000778515 | |
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