Simulation of the ignition of alow pressure rf capacitive discharge / Lisovskiy, V. A., Booth, J.-P. (2003)
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web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000849879
  Physical surface engineering   /     Issue (2003, Т. 1, № 1)

Lisovskiy V. A., Booth J.-P.
Simulation of the ignition of alow pressure rf capacitive discharge

Cite:
Lisovskiy, V. A., Booth, J.-P. (2003). Simulation of the ignition of alow pressure rf capacitive discharge. Physical surface engineering, 1 (1), 34-36. http://jnas.nbuv.gov.ua/article/UJRN-0000849879

 

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