The investigation of RF discharge in the procession-plasma method by coating films / Gritsenko, V. I., Beresnev, V. M., Shvets, O. M. (2003)
Ukrainian

English  Physical surface engineering   /     Issue (2003, 1 (1))

Gritsenko V. I., Beresnev V. M., Shvets O. M.
The investigation of RF discharge in the procession-plasma method by coating films


Cite:
Gritsenko, V. I., Beresnev, V. M., Shvets, O. M. (2003). The investigation of RF discharge in the procession-plasma method by coating films. Physical surface engineering, 1 (1), 37-39. http://jnas.nbuv.gov.ua/article/UJRN-0000849880 [In Russian].

 

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