Development of arc suppression technique for reactive magnetron sputtering / Dudin, S. V., Farenik, V. I., Dahov, A. N., Walkowicz, J. (2005)
web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000859378
Physical surface engineering /  Issue (2005, Т. 3, № 3-4)
Dudin S. V., Farenik V. I., Dahov A. N., Walkowicz J.
Development of arc suppression technique for reactive magnetron sputtering
Cite:
Dudin, S. V., Farenik, V. I., Dahov, A. N., Walkowicz, J. (2005). Development of arc suppression technique for reactive magnetron sputtering. Physical surface engineering, 3 (3-4), 211-215. http://jnas.nbuv.gov.ua/article/UJRN-0000859378 | |
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