Optical properties of submicron silicon oxide films after high-temperature processing / Litvinenko, V. V., Rodionov, V. E., Rodionova, N. A., Shmidko, I. N. (2011)
Ukrainian

English  Physical surface engineering   /     Issue (2011, 9 (4))

Litvinenko V. V., Rodionov V. E., Rodionova N. A., Shmidko I. N.
Optical properties of submicron silicon oxide films after high-temperature processing


Cite:
Litvinenko, V. V., Rodionov, V. E., Rodionova, N. A., Shmidko, I. N. (2011). Optical properties of submicron silicon oxide films after high-temperature processing. Physical surface engineering, 9 (4), 346-349. http://jnas.nbuv.gov.ua/article/UJRN-0000892715 [In Russian].

 

Institute of Information Technologies of VNLU


+38 (044) 525-36-24
Ukraine, 03039, Kyiv, Holosiivskyi Ave, 3, room 209