Evolution of structure and mechanism of thermal decomposition of C/Si multilayers / Zhuravel, I. A., Bugaev, E. A., Penkov, A. V., Zubarev, E. N., Sevrjukova, V. A., Kondratenko, V. V. (2014)
Ukrainian

English  Physical surface engineering   /     Issue (2014, 12 (1))

Zhuravel I. A., Bugaev E. A., Penkov A. V., Zubarev E. N., Sevrjukova V. A., Kondratenko V. V.
Evolution of structure and mechanism of thermal decomposition of C/Si multilayers


Cite:
Zhuravel, I. A., Bugaev, E. A., Penkov, A. V., Zubarev, E. N., Sevrjukova, V. A., Kondratenko, V. V. (2014). Evolution of structure and mechanism of thermal decomposition of C/Si multilayers. Physical surface engineering, 12 (1), 20-30. http://jnas.nbuv.gov.ua/article/UJRN-0000971639 [In Russian].

 

Institute of Information Technologies of VNLU


+38 (044) 525-36-24
Ukraine, 03039, Kyiv, Holosiivskyi Ave, 3, room 209