Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum / Filatov, Yu. D., Sydorko, V. I., Kovalov, S. V., Kovalov, V. A., Yurchyshyn, O. Ya., Danylchenko, M. A., Vietrov, A. H. (2018)
Ukrainian

English  Tooling materials science   /     Issue (2018, 21)

Filatov Yu. D., Sydorko V. I., Kovalov S. V., Kovalov V. A., Yurchyshyn O. Ya., Danylchenko M. A., Vietrov A. H.
Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum


Cite:
Filatov, Yu. D., Sydorko, V. I., Kovalov, S. V., Kovalov, V. A., Yurchyshyn, O. Ya., Danylchenko, M. A., Vietrov, A. H. (2018). Study of the state of the working surface of the tool at polishing the substrate from nitride aluminum. Tooling materials science, 21, 413-420. http://jnas.nbuv.gov.ua/article/UJRN-0001084537 [In Ukrainian].

 

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