Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond / Deng, B., Vej, Ts., Ji, M., Luo, I., Li, L., Chzhou, K., Ma, L. (2020)
Ukrainian

English  Superhard Materials   /     Issue (2020, 3)

Deng B., Vej Ts., Ji M., Luo I., Li L., Chzhou K., Ma L.
Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond


Cite:
Deng, B., Vej, Ts., Ji, M., Luo, I., Li, L., Chzhou, K., Ma, L. (2020). Coupling effects of CH4/H2/Ar gas ratios and hot filament-substrate distance on the growth of nanocrystalline diamond. Superhard Materials, 3, 39-50. http://jnas.nbuv.gov.ua/article/UJRN-0001130384 [In Russian].

 

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