Об особенностях процесса осаждения ионно-плазменных покрытий на основе нитрида титана в области давлений азота 2-10 Па / Хороших В. М., Леонов С. А., Белоус В. А., Толмачева Г. Н. (2009)
|  Physical surface engineering /  Issue (2009, 7 (4))
Khoroshikh V. M., Leonov S. A., Belous V. A., Tolmacheva G. N.
On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa
Cite:
Khoroshikh, V. M., Leonov, S. A., Belous, V. A., Tolmacheva, G. N. (2009). On the features of the process of deposition of ion-plasma coatings based on titanium nitride in the range of nitrogen pressures of 2-10 Pa. Physical surface engineering, 7 (4), 335-340. http://jnas.nbuv.gov.ua/article/UJRN-0000873031 [In Russian]. | |
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