Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor / Rudenko, E. M., Korotash, I. V., Polotskiy, D. Y., Osipov, L. S., Dyakin, M. V., Prikhna, T. A., Shapovalov, A. P. (2015)
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