Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition / Rahmati, A., Khanzadeh, M. (2012)
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web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000724619
  Ukrainian Journal of Physics      А - 2018  /     Issue (2012, Т. 57, № 6)

Rahmati A., Khanzadeh M.
Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition

Cite:
Rahmati, A., Khanzadeh, M. (2012). Effect of nitrogen partial pressure on reactive magnetron sputtering from Ti13Cu87 metalloid target: simulation of chemical composition. Ukrainian Journal of Physics, 57 (6), 643-649. http://jnas.nbuv.gov.ua/article/UJRN-0000724619

 

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