Effect of electron irradiation on the optical properties of nanocrystalline SiC films on single crystal Al2O3 substrates / Semenov, A. V., Lopin, A. V., Boriskin, V. N. (2017)
| Technology and design in electronic equipment / Issue (2017, 3)
Semenov A. V., Lopin A. V., Boriskin V. N. Effect of electron irradiation on the optical properties of nanocrystalline SiC films on single crystal Al2O3 substrates
Cite: Semenov, A. V., Lopin, A. V., Boriskin, V. N. (2017). Effect of electron irradiation on the optical properties of nanocrystalline SiC films on single crystal Al2O3 substrates. Technology and design in electronic equipment, 3, 40-48. http://jnas.nbuv.gov.ua/article/UJRN-0000742906 [In Russian]. |
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