X-ray study of the structure and stress state of TiN coatings deposited from filtered cathodic-arc plasma in the gas mixture N2 with Ar / Vasilev, V. V., Luchaninov, A. A., Reshetnjak, E. N., Strelnitskij, V. E. (2016)
Ukrainian

English  Journal of Surface Physics and Engineering   /     Issue (2016, 1 (4))

Vasilev V. V., Luchaninov A. A., Reshetnjak E. N., Strelnitskij V. E.
X-ray study of the structure and stress state of TiN coatings deposited from filtered cathodic-arc plasma in the gas mixture N2 with Ar


Cite:
Vasilev, V. V., Luchaninov, A. A., Reshetnjak, E. N., Strelnitskij, V. E. (2016). X-ray study of the structure and stress state of TiN coatings deposited from filtered cathodic-arc plasma in the gas mixture N2 with Ar. Journal of Surface Physics and Engineering, 1 (4), 387-397. http://jnas.nbuv.gov.ua/article/UJRN-0000838881 [In Russian].

 

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