Deposition of the stoichiometric coatings by reactive magnetron sputtering / Sagalovych, A., Dudnik, S., Sagalovych, V. (2012)
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web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000906899
  Physical surface engineering   /     Issue (2012, Т. 10, № 3)

Sagalovych A., Dudnik S., Sagalovych V.
Deposition of the stoichiometric coatings by reactive magnetron sputtering

Cite:
Sagalovych, A., Dudnik, S., Sagalovych, V. (2012). Deposition of the stoichiometric coatings by reactive magnetron sputtering. Physical surface engineering, 10 (3), 263-272. http://jnas.nbuv.gov.ua/article/UJRN-0000906899

 

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