Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering / Kozak, A. O., Ivashchenko, V. I., Skrynskyi, P. L., Muratov, V. B., Tetorkin, V. V., Sukach, A., Synelnychenko, O. K., Olifan, O. I. (2020)
Ukrainian

English  Superhard Materials   /     Issue (2020, 5)

Kozak A. O., Ivashchenko V. I., Skrynskyi P. L., Muratov V. B., Tetorkin V. V., Sukach A., Synelnychenko O. K., Olifan O. I.
Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering


Cite:
Kozak, A. O., Ivashchenko, V. I., Skrynskyi, P. L., Muratov, V. B., Tetorkin, V. V., Sukach, A., Synelnychenko, O. K., Olifan, O. I. (2020). Structure and properties of the coatings of the Al–B–Si–C system deposited by magnetron sputtering. Superhard Materials, 5, 34-48. http://jnas.nbuv.gov.ua/article/UJRN-0001195658 [In Ukrainian].

 

Institute of Information Technologies of VNLU


+38 (044) 525-36-24
Ukraine, 03039, Kyiv, Holosiivskyi Ave, 3, room 209