Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching / Jatsunskij, I. R. (2013)
Ukrainian

English  Technology and design in electronic equipment   /     Issue (2013, 6)

Jatsunskij I. R.
Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching


Cite:
Jatsunskij, I. R. (2013). Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching. Technology and design in electronic equipment, 6, 52-56. http://jnas.nbuv.gov.ua/article/UJRN-0000405176 [In Russian].

 

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