Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures / Efremov, A. A., Litovchenko, V. G., Melnik, V. P., Oberemok, O. S., Popov, V. G., Romanyuk, B. M. (2015)
web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0000701174
Ukrainian journal of physics   А - 2018 /  Issue (2015, Vol. 60, № 6)
Efremov A. A., Litovchenko V. G., Melnik V. P., Oberemok O. S., Popov V. G., Romanyuk B. M.
Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures
Cite:
Efremov, A. A., Litovchenko, V. G., Melnik, V. P., Oberemok, O. S., Popov, V. G., Romanyuk, B. M. (2015). Dopant depth profile modification during mass Spectrometric analysis of multilayer nanostructures. Ukrainian journal of physics, 60 (6), 511-520. http://jnas.nbuv.gov.ua/article/UJRN-0000701174 | |
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