Spectroscopic studies of RF discharge plasma at plasma-chemical etching of gallium nitride epitaxial structures / Hladkovskiy, V. V., Fedorovich, O. A. (2017)
UkrainianEnglish

 

Institute of Information Technologies of VNLU


+38 (044) 525-36-24
Ukraine, 03039, Kyiv, Holosiivskyi Ave, 3, room 209