Influence of incident angle of ion beam on intrinsic stress in deposited coating / Kalinichenko, A. I., Perepjolkin, S. S., Strelnitskij, V. E. (2016)
| Journal of Surface Physics and Engineering / Issue (2016, 1 (4))
Kalinichenko A. I., Perepjolkin S. S., Strelnitskij V. E. Influence of incident angle of ion beam on intrinsic stress in deposited coating
Cite: Kalinichenko, A. I., Perepjolkin, S. S., Strelnitskij, V. E. (2016). Influence of incident angle of ion beam on intrinsic stress in deposited coating. Journal of Surface Physics and Engineering, 1 (4), 338-345. http://jnas.nbuv.gov.ua/article/UJRN-0000838875 [In Russian]. |
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