Studying on a beam of protons film of alloy Si-Ge, received by method CVD / Kovalchuk, I. K., Levenets, V. V., Omelnik, A. P., Shchur, A. A., Shirokov, B. M. (2007)
Ukrainian

English  Physical surface engineering   /     Issue (2007, 5 (3-4))

Kovalchuk I. K., Levenets V. V., Omelnik A. P., Shchur A. A., Shirokov B. M.
Studying on a beam of protons film of alloy Si-Ge, received by method CVD


Cite:
Kovalchuk, I. K., Levenets, V. V., Omelnik, A. P., Shchur, A. A., Shirokov, B. M. (2007). Studying on a beam of protons film of alloy Si-Ge, received by method CVD. Physical surface engineering, 5 (3-4), 197-202. http://jnas.nbuv.gov.ua/article/UJRN-0000867748 [In Russian].

 

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