Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma / Shulaev, V. M., Andreev, A. A., Stolbovoj, V. A., Pribytkov, G. A., Gurskikh, A. V., Korosteleva, E. N., Korzhova, V. V. (2008)
Ukrainian

English  Physical surface engineering   /     Issue (2008, 6 (1-2))

Shulaev V. M., Andreev A. A., Stolbovoj V. A., Pribytkov G. A., Gurskikh A. V., Korosteleva E. N., Korzhova V. V.
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma


Cite:
Shulaev, V. M., Andreev, A. A., Stolbovoj, V. A., Pribytkov, G. A., Gurskikh, A. V., Korosteleva, E. N., Korzhova, V. V. (2008). Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma. Physical surface engineering, 6 (1-2), 105-113. http://jnas.nbuv.gov.ua/article/UJRN-0000867771 [In Russian].

 

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