The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation / Komarov, F. F., Milchanin, O. V., Mironov, A. M., Kupchishin, A. I. (2008)
| Physical surface engineering / Issue (2008, 6 (3-4))
Komarov F. F., Milchanin O. V., Mironov A. M., Kupchishin A. I. The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation
Cite: Komarov, F. F., Milchanin, O. V., Mironov, A. M., Kupchishin, A. I. (2008). The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation. Physical surface engineering, 6 (3-4), 142-150 . http://jnas.nbuv.gov.ua/article/UJRN-0000872884 [In Russian]. |
|
|