The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation / Komarov, F. F., Milchanin, O. V., Mironov, A. M., Kupchishin, A. I. (2008)
Ukrainian

English  Physical surface engineering   /     Issue (2008, 6 (3-4))

Komarov F. F., Milchanin O. V., Mironov A. M., Kupchishin A. I.
The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation


Cite:
Komarov, F. F., Milchanin, O. V., Mironov, A. M., Kupchishin, A. I. (2008). The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation. Physical surface engineering, 6 (3-4), 142-150 . http://jnas.nbuv.gov.ua/article/UJRN-0000872884 [In Russian].

 

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