Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals / Sagalovich, A. V., Sagalovich, V. V., Dudin, S. V., Farenik, V. I. (2014)
  |     Physical surface engineering   /      Issue (2014, 12 (2))
 Sagalovich A. V., Sagalovich V. V., Dudin S. V., Farenik V. I. Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals 
 Cite: Sagalovich, A. V., Sagalovich, V. V., Dudin, S. V., Farenik, V. I. (2014). Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals. Physical surface engineering, 12 (2), 285-298. http://jnas.nbuv.gov.ua/article/UJRN-0001031073 [In Russian].  |  | 
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