Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals / Sagalovich, A. V., Sagalovich, V. V., Dudin, S. V., Farenik, V. I. (2014)
Ukrainian

English  Physical surface engineering   /     Issue (2014, 12 (2))

Sagalovich A. V., Sagalovich V. V., Dudin S. V., Farenik V. I.
Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals


Cite:
Sagalovich, A. V., Sagalovich, V. V., Dudin, S. V., Farenik, V. I. (2014). Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals. Physical surface engineering, 12 (2), 285-298. http://jnas.nbuv.gov.ua/article/UJRN-0001031073 [In Russian].

 

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