Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals / Sagalovich, A. V., Sagalovich, V. V., Dudin, S. V., Farenik, V. I. (2014)
| Physical surface engineering / Issue (2014, 12 (2))
Sagalovich A. V., Sagalovich V. V., Dudin S. V., Farenik V. I. Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals
Cite: Sagalovich, A. V., Sagalovich, V. V., Dudin, S. V., Farenik, V. I. (2014). Comparative analysis of different plasma sources for reactive deposition of coatings and diffusion saturation of metals. Physical surface engineering, 12 (2), 285-298. http://jnas.nbuv.gov.ua/article/UJRN-0001031073 [In Russian]. |
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