The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma / Vasilev, V. V., Luchaninov, A. A., Reshetnjak, E. N., Strelnitskij, V. E., Tolmacheva, G. N., Pribytkov, G. A., Gurskikh, A. V., Krinitsyn, M. G. (2015)
Ukrainian

English  Physical surface engineering   /     Issue (2015, 13 (2))

Vasilev V. V., Luchaninov A. A., Reshetnjak E. N., Strelnitskij V. E., Tolmacheva G. N., Pribytkov G. A., Gurskikh A. V., Krinitsyn M. G.
The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma


Cite:
Vasilev, V. V., Luchaninov, A. A., Reshetnjak, E. N., Strelnitskij, V. E., Tolmacheva, G. N., Pribytkov, G. A., Gurskikh, A. V., Krinitsyn, M. G. (2015). The use of powder cathodes for the deposition of Ti-Si-N coatings from a filtered vacuum arc plasma. Physical surface engineering, 13 (2), 148-163. http://jnas.nbuv.gov.ua/article/UJRN-0001059741 [In Russian].

 

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