Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge / Kovtun, Yu. V., Glazunov, G. P., Moiseenko, V. E., Maznichenko, S. M., Bondarenko, M. N., Konotopskiy, A. L., Siusko, Y. V., Tarasov, I. K., Shapoval, A. N., Lozin, A. V. (2021)
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