Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge / Kovtun, Yu. V., Glazunov, G. P., Moiseenko, V. E., Maznichenko, S. M., Bondarenko, M. N., Konotopskiy, A. L., Siusko, Y. V., Tarasov, I. K., Shapoval, A. N., Lozin, A. V. (2021)
web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0001320931
Science and Innovation   А - 2018 /  Issue (2021, Vol. 17, № 4)
Kovtun Yu. V., Glazunov G. P., Moiseenko V. E., Maznichenko S. M., Bondarenko M. N., Konotopskiy A. L., Siusko Y. V., Tarasov I. K., Shapoval A. N., Lozin A. V.
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
Cite:
Kovtun, Yu. V., Glazunov, G. P., Moiseenko, V. E., Maznichenko, S. M., Bondarenko, M. N., Konotopskiy, A. L., Siusko, Y. V., Tarasov, I. K., Shapoval, A. N., Lozin, A. V. (2021). Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge. Science and Innovation, 17 (4), 33-43. http://jnas.nbuv.gov.ua/article/UJRN-0001320931 | |
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