Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge / Kovtun Yu. V., Glazunov G. P., Moiseenko V. E., Maznichenko S. M., Bondarenko M. N., Konotopskiy A. L., Siusko Y. V., Tarasov I. K., Shapoval A. N., Lozin A. V. (2021)
інтернет-адреса сторінки: http://jnas.nbuv.gov.ua/article/UJRN-0001320931
Science and innovation   А - 2018 /  Випуск (2021, Vol. 17, № 4)
Kovtun Yu. V., Glazunov G. P., Moiseenko V. E., Maznichenko S. M., Bondarenko M. N., Konotopskiy A. L., Siusko Y. V., Tarasov I. K., Shapoval A. N., Lozin A. V.
Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge
Cite:
Kovtun, Yu. V., Glazunov, G. P., Moiseenko, V. E., Maznichenko, S. M., Bondarenko, M. N., Konotopskiy, A. L., Siusko, Y. V., Tarasov, I. K., Shapoval, A. N., Lozin, A. V. (2021). Development of Technology for Vacuum Surface Conditioning by RF Plasma Discharge Combined with DC Discharge. Science and Innovation, 17 (4), 33-43. http://jnas.nbuv.gov.ua/article/UJRN-0001320931 | |
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