The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN / Horokh, D. V., Maksakova, O. V., Klymenko, C. A., Lytovchenko, S. V., Beresniev, V. M., Hlukhov, O. V. (2022)
Ukrainian

English  Superhard Materials   /     Issue (2022, 6)

Horokh D. V., Maksakova O. V., Klymenko C. A., Lytovchenko S. V., Beresniev V. M., Hlukhov O. V.
The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN


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Cite:
Horokh, D. V., Maksakova, O. V., Klymenko, C. A., Lytovchenko, S. V., Beresniev, V. M., Hlukhov, O. V. (2022). The influence of the bias potential and working gas pressure on the properties of the ion-plasma multilayer coating TiSiN/NbN. Superhard Materials, 6, 44-52. http://jnas.nbuv.gov.ua/article/UJRN-0001367365 [In Ukrainian].

 

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