Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings / Borysov Yu. S., Volos O. V., Vihilianska N. V., Zadoya V. G., Strelchuk V. V. (2022)
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web address of the page http://jnas.nbuv.gov.ua/article/UJRN-0001532645
  The Paton welding journal   /     Issue (2022, № 9)

Borysov Yu. S., Volos O. V., Vihilianska N. V., Zadoya V. G., Strelchuk V. V.
Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings

Бібліографічний опис:
Borysov Yu. S., Volos O. V., Vihilianska N. V., Zadoya V. G., Strelchuk V. V. Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings. The Paton welding journal. 2022. № 9. С. 15-20. URL: http://jnas.nbuv.gov.ua/article/UJRN-0001532645

 

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