Модернизация вакуумно-дуговых установок для синтеза покрытий и азотирования методом ионной имплантации и осаждения / Шулаев В. М., Андреев А. А., Руденко В. П. (2006)
| Physical surface engineering / Issue (2006, 4 (3-4))
Shulaev V. M., Andreev A. A., Rudenko V. P. Improvement of vacuum-arc equipment for nitration and coating synthesis by means of ion implantation and deposition
Cite: Shulaev, V. M., Andreev, A. A., Rudenko, V. P. (2006). Improvement of vacuum-arc equipment for nitration and coating synthesis by means of ion implantation and deposition. Physical surface engineering, 4 (3-4), 136-142. http://jnas.nbuv.gov.ua/article/UJRN-0000855344 [In Russian]. |
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