Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization / Derevjanko, A. V., Stervoedov, A. N., Silkin, M. Ju. (2008)
Ukrainian

English  Physical surface engineering   /     Issue (2008, 6 (1-2))

Derevjanko A. V., Stervoedov A. N., Silkin M. Ju.
Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization


Cite:
Derevjanko, A. V., Stervoedov, A. N., Silkin, M. Ju. (2008). Ion-beam deposition of ultrathin metall nitride and oxynitride films process stabilization. Physical surface engineering, 6 (1-2), 114-120. http://jnas.nbuv.gov.ua/article/UJRN-0000867772 [In Russian].

 

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